The Model 2012AF Flood Exposure System provides a cost-effective method for automated flood exposure.
The Model 2012SM Automated Edge-Bead Exposure System provides a cost-effective method for edge-bead removal using standard shadow mask technology.
Both models allow for rapid and efficient mask and substrate changeover, adding to both versatility and high-volume throughput of this production tool. Additionally, they are designed to accommodate wafers from 8″ to 300mm and the tool features automated FOUP loading.
