Extreme DUV Mask Aligner 170nm-200nm
OAI’S Model 200E DUV Mask Aligner performs all the functions of the tabletop Model 200 Mask Aligner but utilizes a 185nm Excimer Lamp as the UV light source. It is used for biotechnology processing.
Come visit OAI at SPIE in San Jose, CA – Booths 711 and 713 with our partners C&D Semiconductors.