This UV LED light source is designed and engineered by the proven lithography experts at OAI. The light source delivers a number of unique benefits, the most consequential of which is consistent intensity over an exceptionally long life. The light source is highly energy efficient, requires no maintenance or light replacement, and contains no mercury.
The OAI UV LED Light source delivers a beam size of between 4″ and 12″ with beam uniformity better than ±4%. It features a prism array and light pipe for superior uniformity. Collimation angle less than 2 degrees. This light source is capable of variable intensities, with wavelength of 365nm, 405nm, or a combination thereof. Additional features include dose control and timed exposure. Easy to use, the OAI light source uses a touch screen interface and has a USB remote interface.
The UV light source offers a variety of options including a heavy-duty stand, a Tooling Module for photolithography printing, and single or multiple wavelength versions. This system may be integrated into any OAI Lithography System.
