Coat | Bake | Align/Expose | Develop
- Fully manufactured in the USA
- Cluster configuration allows for dynamic wafer flow and parallel application processing
- Single terminal for control over recipe and program selection; P9000 performs as the master user interface
- Fewer operators needed in the lithography module.
- Reduced wafer handling: higher wafer yield, reduced contamination and defects, higher die yields
- Lower cost of ownership for maximum return on investment versus other integrated system suppliers
- Small footprint for reduced fab space usage
- Multiple wafer sizes can be processed simultaneously
- Optimized for customer requirements
