MEMS and Sensors

The OAI Model 200 Mask Aligner is a cost-effective high performance mask aligner that has been engineered with industry proven...

The OAI Model 30 UV Light Source (shown with optional stand) consists of a stand-alone light source, constant intensity controller,...

The OAI Model 200IR Mask Aligner is a tabletop system that requires minimal clean room space. It is a cost-effective alternative...

The OAI UV Model 30E Enhanced UV Light Source consists of a stand-alone Model 30 UV Light Source, a constant intensity controller,...

This UV LED light source is designed and engineered by the proven lithography experts at OAI. The light source delivers a...

The OAI Model 800E Frontside & Backside Semi-Automatic Mask Aligner system offers advanced features and specifications...

The OAI Model 2000 Exposure Systems may be configured as either an Edge-Bead Exposure System (2000SM) or a Flood Exposure...

For Production Semiconductors, MEMS, Sensors, Advanced Packaging, IOT, Microfluidics With over five decades of manufacturing...

The Model 2012AF Flood Exposure System provides a cost-effective method for automated flood exposure. The Model 2012SM Automated...

Automated Mask Aligner with integrated mask changer The Model 6000A-MC is a precision system combining OAI’s Model...

OAI’s Nanoimprint Module System is a modular add-on that may be used on any mask aligner. This innovative technology...

Dependable and repeatable, the OAI Model 308 UV Light Meter is a precise, direct-reading instrument designed to measure UV...

Built for high intensity applications, the OAI Model 308T UV Light Meter is a dependable, direct-reading instrument designed...

OAI Model 656 Meter is designed for use with all mask aligners and flood exposure systems. For over 50 years, OAI has been...

For over 50 years, OAI has been world leader in UV Light and Energy Measurement instrumentation used for reliable accurate...

Probes: 220, 248, 254, 260, 310, 365, 380, 400, 420, 436, 540nm Stepper probes: 365, 400, 420, 436nm High temperature, high...

Wafer bonding has found many applications in the field of MST, MEMS, and micro-engineering. These include the fabrication...

Collimated modular unit with excellent uniformity

OAI offers a unique process which extends the life of your mask, says good bye to tedious washing and drying of mask and...

OAI offers custom designed solutions built to your unique specifications. Contact us today to learn more and we will find...

We invite you to consider OAI as your technology partner. OAI combines innovative design and manufacturing expertise with...